MEMS

MEMS (micro electro-mechanical systems) is a technology to fabricate devices having a 3-dimensional structure (high aspect ratio, ultraprecision pattern) and a movable structure by adding unique processing technologies to the film-forming technology, photolithography (photoengraving technology), and etching technology which are the basics of silicon LSI processing technology. As the film-forming technology, nickel plating (electroforming) is playing an active part.

Features	Uses
Basic configuration of LIGA process (“Hyomen Gijutsu” Vol. 55, P. 226, 2004 by Yasui, Hirabayashi, Fujita)	(1) CD/DVD stompers, shadow masks, printing meshes, etc. (2) Inkjet print head micronozzles, semiconductor pressure sensors, acceleration sensors, flow rate sensors, and various other sensors (3) Micromolds, microsprings, microgears, electrostatic micromotors (4) Micro chemical chips, micro-fluid devices, micropumps, etc. (“Maikuro Nanomashin Gijutsu Nyumon” by Hiroyuki Fujita; Kogyo Chosakai) (From “Hyomen Gijutsu” Vol. 55, P. 237, 2004 by Mizutani, Nagayama) * LIGA: Abbreviation for Lithographie (lithography)-Galvanoformung (electroforming)-Abformung (molding)

Features

Uses

Basic configuration of LIGA process
(“Hyomen Gijutsu” Vol. 55, P. 226, 2004 by Yasui, Hirabayashi, Fujita)

(1) CD/DVD stompers, shadow masks, printing meshes, etc.

(2) Inkjet print head micronozzles, semiconductor pressure sensors, acceleration sensors, flow rate sensors, and various other sensors

(3) Micromolds, microsprings, microgears, electrostatic micromotors

(4) Micro chemical chips, micro-fluid devices, micropumps, etc.

(“Maikuro Nanomashin Gijutsu Nyumon” by Hiroyuki Fujita; Kogyo Chosakai)
(From “Hyomen Gijutsu” Vol. 55, P. 237, 2004 by Mizutani, Nagayama)

* LIGA: Abbreviation for Lithographie (lithography)-Galvanoformung (electroforming)-Abformung (molding)

Adoption examples

Types of plating

Plating technologies

Adoption examples